质量流量计(匹配相应控制器)(JJ24000185)采购公告

发布时间: 2024年04月15日
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项目名称 项目编号 公告开始日期 公告截止日期 采购单位 付款方式 联系人 联系电话 签约时间要求 到货时间要求 预算总价 发票要求 含税要求 送货要求 安装要求 收货地址 供应商资质要求 公告说明
质量流量计(匹配相应控制器)****
2024-04-15 14:37:272024-04-18 15:00:00
****
签约后3个工作日内
¥105000.00
钢铁楼308

符合《政府采购法》第二十二条规定的供应商基本条件


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质量流量计(匹配相应控制器) 7 其他专用仪器仪表
品牌 型号 预算单价 技术参数及配置要求 参考链接 售后服务
Brooks
5850E
¥ 15000.00
Standard Ranges: 3 sccm to 30 slpm* (Nitrogen equivalent) *Standard temperature and pressure in accordance with SEMI (Semiconductor Equipment and Materials International) standard:0°C and 101.3 kPa(760 Torr). Accuracy: ±1% full scale including linearity at calibration conditions. ±1.5% full scale including linearity for flow ranges greater than 20 slpm. Repeatability: 0.25% of rate Response Time: Less than 3 seconds response to within 2% of full scale final value with a 0 to 100% command step. Power Requirements(NC Valve): +15 Vdc ±5%,35 mA -15 Vdc ±5%,180 mA 3.5 watts power consumption Power Requirements(NO Valve): +15 Vdc ±5%,215 mA -15 Vdc ±5%,180 mA 11.85 watts power consumption Ambient Temperature Limits: Operating:40°F to 150°F (5°C to 65°C) Non-operating: -13°F to +212F (-25C to 100°C) Working Pressure: 1500 psi (10.342 mPa) maximum Differential Pressure: 5 to 50 psi (minimum pressure drop depends on gas and range). Refer to Orifice Sizing, Section 4-6. Output Signal: 0-5 Vdc into 2000 ohms or greater. Maximum ripple 3 mV. 5 Volt Reference Output: 5 Volts ±0.2%. Maximum load 1 k ohms. Temperature Sensitivity: Zero: less than ±0.075% F.S. per degree C. Span: less than ±1.0% F.S. shift over 10-50°C range Power Supply Sensitivity: ±0.09% full scale per % power supply voltage variation Mounting Attitude Sensitivity: ±0.5% maximum full scale deviation after re-zeroing Command Input: 0-5 Vdc. Input resistance 200 k ohm Leak Integrity: 1 x10-9Atm.cc/sec Helium Control Range: 50 to 1 Mechanical Connection: Compatible with most popular mass flow controllers. Refer to Figure 2-1. Electrical Connection: Card edge, 20 terminals, gold over low stress nickel plated copper.15-pin D-Connector(DA-15P)

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质量流量计(匹配相应控制器)(JJ24000185)采购公告
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